Yes, transistor densities are increasing, interconnects are getting denser as well (that's what the "metal pitch" is about). There are also improvements in power consumption.
I imagine there is more use of EUV and surely material compositions are getting tweaks as well.
This is pretty much as it has been for the last couple of decades, though at a somewhat slower rate and with an increasing number of caveats. For example, the density of SRAM has recently been decreasing more slowly than the density of logic. What's particularly tricky are the economics: the cost per transistor isn't really going down much anymore.
I imagine there is more use of EUV and surely material compositions are getting tweaks as well.
This is pretty much as it has been for the last couple of decades, though at a somewhat slower rate and with an increasing number of caveats. For example, the density of SRAM has recently been decreasing more slowly than the density of logic. What's particularly tricky are the economics: the cost per transistor isn't really going down much anymore.